Research

Research Interests

• Fundamentals of multilayered inorganic thin film nanostructures for Micro and Nanoelectronics: PVD, CVD and MBE Growth, Processing and Characterization
• Advanced Electrode Materials and workfunction tuning
• Metallization and Diffusion Barriers
• Hydrogen and Impurity Defects in High-k Dielectrics
• Thermal stability, Interfacial diffusion, reaction and properties inter-correlations in High-k dielectrics based electronic nano-structures
• Advanced Ion Beam Analysis methods: RBS, NRA, Channeling, PIXE, ERDA,..
•  X-ray Photoelectron Spectroscopy and Thermal desorption