Publications

B. P. Gorman, Rosa A. Orozco-Teran, Jodi A. Roepsch, Hanjiang Dong and Richard F. Reidy, High Strength, Low Dielectric Constant Fluorinated Silica Xerogel Films, App. Phys. Lett. 79 (2001) 4010-4012.

J. Quintanilla, R.F. Reidy, B.P. Gorman, D.W. Mueller, Gaussian Random Field Models of Aerogels, Journal of Applied Physics 93 (2003) 4584-9.

B.P. Gorman, R.A. Orozco-Teran, Z. Zhang, P.D. Matz, D.W. Mueller, and R.F. Reidy, Rapid Repair of Plasma Ash Damage in Low-k Dielectrics Using Supercritical CO2, Journal of Vacuum Science and Technology B, 22, 3 (2004) 1210-1212

Hanjiang Dong, B.P. Gorman, Zhengping Zhang, R.A. Orozco-Teran, J.A. Roepsch, D.W. Mueller, M.J. Kim, R. F. Reidy, Reinforcement Mechanism for Mechanically-Enhanced Xerogel Films, Journal of Non-Crystalline Solids, 350 (2004) 345-350.

P.D. Matz and R.F. Reidy, Supercritical CO2 Applications in BEOL Cleaning, Solid State Phenomena 103-104 (2005) 315-322

Hanjiang Dong, Richard F. Reidy, and John D. Brennan, Shrinkage and Springback Behavior of Methylsilsesquioxanes Prepared by an Acid/Base Two-Step Processing Procedure, Chemistry of Materials, 17, 24 (2005) 6012 – 6017

H. Dong, Z. Zhang, M-H Lee, D.W. Mueller, R.F. Reidy, Sol-Gel Polycondensation of Methyltrimethoxysilane in Ethanol Studied by 29Si NMR Spectroscopy Using a Two-Step Acid-Base Procedure, Journal of Sol-Gel Science and Technology, 41 (2007) 11-17

R.F. Reidy, Can Spin-on or CVD Porous Low-k Films Meet Future Integration Needs?, Future Fab International, 23 (2007) 95-98.

Souvik Banerjee, Richard F. Reidy, and Laura B. Rothman, Cryogenic Aerosols and Supercritical Fluid Cleaning, Handbook of Semiconductor Wafer Cleaning Technology, 2nd edition, Editors: Werner Kern, Karen Reinhardt, 2007